Aixcon PowerSystems GmbH produces microwave generators for both high-end and simple applications. For many years, the products of the microwave Y generation set new standards for highly precise, dynamic processes.

The new generation of Y-generators has been completely reworked for even greater precision and efficiency. Overall, the new generation delivers with its simple and fast setup, wealth of customizable interfaces (Analog, Profinet, others on request), and is available in both air- and water-cooled versions. The new microwave generation is ideally suited for clean room applications.

The new intelligent control unit significantly increases the life of the magnetron.

It is possible to pulse the microwave to cover any application.

The following performance classes are currently available:

1.25 kW
2.00 kW
3.00 kW
6,00 kW
Higher performance on request


Aixcon PowerSystems also supplies magnetrons, waveguides, launchers, loads, automatic and manual tuners as well as many other products. Contact us.

Good to Know:

The Y-2000 generators for the Novellus / Garsonic PEP 3510+ (PEP Plus 3510 – Photoresist Removal System) are still available. These have the option to receive updated configuration software (Windows compatible 07.08.10) and are therefore the ideal replacement equipment.

We gladly provide support in the commissioning of replacement devices.

Unsere Repräsentanten

Nord Amerika

Odyssey Technical Solutions

2000 Steam Way, Round Rock, TX 78665

Phone: +1-877-989-7007 (toll free within US)

Local Phone: +1-512-989-7007

General Information:

Sales and Service:


Odyssey Technical Solutions Singapore Pte. Ltd.

2 Serangoon North Avenue 5 #04-02B
Singapore 554911



General Information:

Sales and Service: